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High-temperature oxygen-free oven in the semiconductor industry uses


High-temperature anaerobic oven is applied to PI (polyimide) curing, BCB polymer, PBO high-temperature curing, silver adhesive curing, photoresist curing, moisture-sensitive film baking process in gold-plating program, annealing of automotive glass coating, high-temperature annealing of silicon wafers, anti-oxidation baking of PCB, anaerobic baking process of Viton materials, and special process requirements for dust-free drying of electronic ceramic materials, etc. It is suitable for factory production, university research, scientific research and development. Baking process, electronic ceramic materials, dust-free drying of special process requirements, applicable to factory production, university research, scientific research institutions, research and development.

The use of PI high temperature anaerobic baking oven

Polyimide (PI) is one of the most widely used polymer materials in the semiconductor and microelectronics industry, PI is a class of polymers composed of imide ring monomers. The aromatic structure of PI's thermal properties are stable, so usually microelectronics industry PI materials used by the aromatic tetraacidic anhydride and aromatic diamine polyamide acid or polyamide ester polycondensation reaction occurs in organic solutions, and then after a certain method to make it imide (cyclization) to get PI. due to the rigid structure of the cyclic imide on the skeleton of the PI and the aromatic structure makes it has a very good Thermal stability, excellent mechanical properties (high strength, low coefficient of expansion, wear-resistant aging, creep), electrical properties (low dielectric constant, low leakage) and chemical properties (stable, resistant to oil, organic solvents, dilute acids, etc.). At the same time, PI has better film-forming properties and mechanical properties than inorganic dielectric materials (silicon dioxide, silicon nitride), and has good bonding properties to commonly used silicon wafers, metals and dielectric materials, which are widely used in electronics, optics, aerospace, photovoltaic devices and other fields.

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