[
Agilent 5517D Laser Head
]
Product Name:
Agilent 5517D Laser Head
Product Model:
Agilent 5517D Laser Head
Manufacturer:
Keysight Technologies
file:
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Product Description
The Keysight 5517D is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.
Agilent 5517D Laser Head
Key Features & Specifications
General
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Maximum velocity with linear optics: 1 m/s
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Reference frequency: 3.4 to 4.0 MHz
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Weight: 3.4 kg (7.5 lb)
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Warm up time: 90 minutes
Laser Beam
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Diameter: 6 mm; option 039: 9 mm & > 300 µW available
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Minimum output power: 180 µW ; option H01: 300 µW available
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Maximum output power: 1 mW
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Beam height: 79.5 ± 1.0 mm
Input Power Requirement
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+15 V ± 0.3 V at 3.0 A maximum
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-15 V ± 0.3 V at 0.3 A maximum
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