Agilent B1500A Semiconductor Device Analyzer

Introduction

The Agilent B1500A Semiconductor Device Analyzer is the only parameter analyzer with the versatility to provide a wide range of device characterization capabilities, uncompromised measurement reliability, and eficient and repeatable measurement. It supports all state-of-the-art measurements (IV, CV, and fast pulsed IV), giving it the ability to cover the electrical characterization and evaluation of devices, materials, semiconductors, active/passive components, or virtually any other type of electronic device. In addition, the B1500A’s modular architecture with ten available slots allows you to add or upgrade measurement modules if your measurement needs change over time.

Agilent EasyEXPERT, resident GUI-based software running on the B1500A’s embedded Windows 7 platform, supports eficient and repeatable device characterization ranging from interactive manual measurements all the way up to test automation across a wafer in conjunction with a semiautomatic wafer prober. With hundreds of ready-to-use measurements (application tests) furnished at no charge, EasyEXPERT makes it easy to perform complex device characterization immediately. The EasyEXPERT GUI can be accessed using the B1500A’s 15-inch touch screen, as well as through an optional USB keyboard and mouse. EasyEXPERT also allows you the option of storing test condition and measurement data automatically after each measurement in unique workspaces, ensuring that valuable information is not lost and that measurements can be repeated at a later date. Finally, EasyEXPERT has built-in analysis capabilities and a graphical programming environment that facilitate the development of complex testing algorithms.

  Accurate and precise measurement ranges of 0.1 fA - 1 A and 0.5 µV - 200 V • Spot and sweep measurement • Time sampling measurements (100 µs minimum sampling rate) • Pulsed measurement with minimum pulse widths of 50 µs using the MCSMU or 500 µs using the HPSMU, MPSMU, or HRSMU • The ASU (atto-sense and switch unit) can be used with the MPSMU, or HRSMU to provide 0.1 fA measurement resolution and SMU/AUX path switching • Two analog-to-digital converter choices (high-resolution ADC or high-speed ADC) available for each SMU type (HPSMU, MPSMU and HRSMU)

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