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Perfluoroelastomer (FFKM
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Product Name:
Perfluoroelastomer (FFKM
Product Model:
other brand
Manufacturer:
SEEFAR
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Product Description
Perfluoroelastomers are a type of synthetic rubber having even greater heat and chemical resistance than the fluoroelastomers. Perfluoroelastomers are widely used as seals on semiconductor wafer proce
Perfluoroelastomer (FFKM
Properties of Perfluoroelastomers (FFKM) - This rubber has extraordinary resistance to harsh chemicals and heat.
- They are enable to withstand virtually any process media, including reactive plasmas, at temperatures as high as 327°C.
- In plasma and chemical vapor deposition applications, perfluoroelastomers can withstand long term exposure in etching, stripping and cleaning processes.
- In wet chemical operations, swelling due to prolonged chemical exposure and poor elastic recovery are frequent causes of seal failure. These inadequacies are eliminated in perfluoroelastomers.
- The reliability of seals made from perfluoroelastomers leads to reduced wafer yield losses and lowered frequency of maintenance and operations disruptions.
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Perfluoroelastomer (FFKM
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